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SEMI MF2139 — Test Method for Measuring Nitrogen Concentration in Silicon Substrates by Secondary Ion Mass Spectrometry
SEMI E89等で網羅しており，統計的な考察を議論することは行わない。
among others
E 本スタンダードは2009年6月，編集上の誤りを修正するため改訂された。表A1-1で変更がなされている。
Semiconductor Manufacturing Monitor - Single Edition StdPbc-0801 SEMI MF2139 — Test MethodJoint report from SEMI and VLSI Resarch covering semiconductor equipment billings, fab capacity as well as semiconductor and electronics sales. Report includes two full years of historical data plus a one quarter outlook for the semiconductor manufacturing supply chain, including leading IDM, fabless, foundry, OSAT, and equipment companies.
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